Development of a high-speed profilometer for manufacturing inspection
Name
Ljubicic-2010-Development of a high-speed profilometer for manufacturing inspection.pdf
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3.75 MB
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Adobe PDF
Checksum (MD5)
c115f075edc8989829e77dac30004aba
Author(s)
Ljubicic, Dean M.
Anthony, Brian
Date Issued
August 2010
Journal
Proceedings of SPIE--the International Society for Optical Engineering
Publisher
SPIE
Citation
Dean M. Ljubicic and Brian Anthony, "Development of a high-speed profilometer for manufacturing inspection", Proc. SPIE 7767, 776705 (2010); doi:10.1117/12.860166 © 2010 COPYRIGHT SPIE
Version
Final published version
Abstract
Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1117/12.860166
