Ion beam enhanced grain growth in thin films

Name

RLE-TR-527-17691187.pdf

Size

8.48 MB

Format

Adobe PDF

Checksum (MD5)

d44993ba3e01006fc8a132067c10de10

Date Issued

1987

Publisher

Massachusetts Institute of Technology, Research Laboratory of Electronics

Series/Report no.

Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 527.

Description

Bibliography: p. 213-224.

MIT Department

Massachusetts Institute of Technology. Research Laboratory of Electronics

Persistent DSpace Link