Bayesian inference of substrate properties from film behavior
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RA_MJD_YMM_MSMSE2014.pdf
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13.83 MB
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Author(s)
Aggarwal, Raghav
Demkowicz, Michael J.
Marzouk, Youssef M.
Date Issued
December 2014
Journal
Modelling and Simulation in Materials Science and Engineering
Publisher
IOP Publishing
Citation
Aggarwal, R, M J Demkowicz, and Y M Marzouk. “Bayesian Inference of Substrate Properties from Film Behavior.” Modelling Simul. Mater. Sci. Eng. 23, no. 1 (December 19, 2014): 015009.
Version
Author's final manuscript
Abstract
We demonstrate that by observing the behavior of a film deposited on a substrate, certain features of the substrate may be inferred with quantified uncertainty using Bayesian methods. We carry out this demonstration on an illustrative film/substrate model where the substrate is a Gaussian random field and the film is a two-component mixture that obeys the Cahn–Hilliard equation. We construct a stochastic reduced order model to describe the film/substrate interaction and use it to infer substrate properties from film behavior. This quantitative inference strategy may be adapted to other film/substrate systems.
MIT Department
Massachusetts Institute of Technology. Department of Aeronautics and Astronautics
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Department of Mechanical Engineering
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Creative Commons Attribution-Noncommercial-Share Alike
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DOI of Published Version
https://doi.org/10.1088/0965-0393/23/1/015009
