Precision passive alignment of wafers

Weber, Alexis Christian, 1974-

Precision passive alignment of wafers

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Author(s)

Weber, Alexis Christian, 1974-

Advisor(s)

Alexander H. Slocum.

Date Issued

2002

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.

Includes bibliographical references (p. 73-75).

Subjects

Mechanical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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