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  5. Precision passive alignment of wafers

Precision passive alignment of wafers

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Author(s)
Weber, Alexis Christian, 1974-
Advisor(s)
Alexander H. Slocum.
Date Issued
2002
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2002.
Includes bibliographical references (p. 73-75).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/89364
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