Sub-20nm substrate patterning using a self-assembled nanocrystal template
Name
67766814-MIT.pdf
Description
Full printable version
Size
12.64 MB
Format
Adobe PDF
Checksum (MD5)
5e3de74e66348cd36a61e661fdc87afb
Author(s)
Tabone, Ryan C
Advisor(s)
Vladimir BuloviÄ.
Date Issued
2005
Publisher
Massachusetts Institute of Technology
Abstract
A hexagonally close-packed monolayer of lead selenide quantum dots is presented as a template for patterning with a tunable resolution from 2 to 20nm. Spin-casting and micro-contact printing are resolved as methods of forming and depositing these monolayers of quantum dots through self-assembly. Four methods of templated patterning - shadowmasking, lift-off, selective ablation & nano-imprinting - using the quantum dot self-assembled monolayer are proposed and explored. The nano-imprinting technique is used to produce the smallest pattern in anodized alumina to date. The use of this nano-patterned anodized alumina as an etch mask is discussed as a means of patterning substrates within the 2 to 20nm range. The physics behind the possible modification of silicon's electronic band gap due to our nano-patterning is also presented.
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2005.
Includes bibliographical references (p. 105-110).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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