Sub-50nm x-ray lithography with application to a coupled quantum dot device
Name
40335770-MIT.pdf
Description
Full printable version
Size
38.37 MB
Format
Adobe PDF
Checksum (MD5)
ce59fd0ec4156fe4107f2ed8f6b86655
Author(s)
Carter, David John Donat, 1966-
Advisor(s)
Henry I. Smith and Terry P. Orlando.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (p. 214-231).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
Persistent DSpace Link
