Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes
Name
830026900-MIT.pdf
Description
Full printable version
Size
7.51 MB
Format
Adobe PDF
Checksum (MD5)
89db779ac3c354ad6127e508f982fd45
Author(s)
Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
Advisor(s)
Jung-Hoon Chun.
Alternative Title
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film lead zirconate titanate fabrication processes
Date Issued
2012
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 80).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
Persistent DSpace Link
