Correlation of silicon microroughness with electrical parameters of SOI-AS (silicon-on-insulator with active substrate)
Name
40295239-MIT.pdf
Description
Full printable version
Size
29.33 MB
Format
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Checksum (MD5)
730ddee299ab5480d917e1e8c573cd98
Author(s)
Nayfeh, Hasan M. (Hasan Munir), 1974-
Advisor(s)
Dimitri A. Antoniadis.
Alternative Title
Correlation of silicon microroughness on electrical parameters of SOI-AS (silicon-on-insulator with active substrate)
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 83-86).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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