Healing of donor defect states in monolayer molybdenum disulfide using oxygen-incorporated chemical vapour deposition
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Shen21LinNatureElectronics.pdf
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Accepted version
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Author(s) • • • • • • • • •
Shen, Pin-Chun
Lin, Yuxuan
Su, Cong
McGahan, Christina
Lu, Ang-Yu
Ji, Xiang
Wang, Xingzhi
Wang, Haozhe
Mao, Nannan
Guo, Yunfan
Date Issued
December 2021
Journal
Nature Electronics
Publisher
Springer Science and Business Media LLC
Citation
Shen, Pin-Chun, Lin, Yuxuan, Su, Cong, McGahan, Christina, Lu, Ang-Yu et al. 2022. "Healing of donor defect states in monolayer molybdenum disulfide using oxygen-incorporated chemical vapour deposition." Nature Electronics, 5 (1).
Version
Author's final manuscript
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Nuclear Science and Engineering
Massachusetts Institute of Technology. Department of Chemical Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1038/s41928-021-00685-8