Highly coherent gratings for optoelectronics : an application of spatial-phase-locked electron beam lithography
Name
31317609-MIT.pdf
Description
Full printable version
Size
5.74 MB
Format
Adobe PDF
Checksum (MD5)
d9855b3d495850a2259a2103e0879b71
Author(s)
Ferrera, Juan (Ferrera Uranga)
Advisor(s)
Henry I. Smith.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Includes bibliographical references (leaves 75-79).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
Persistent DSpace Link
