A remotely automated microscope for characterizing micro electromechanical systems (MEMS)
Name
49337673-MIT.pdf
Description
Full printable version
Size
11.75 MB
Format
Adobe PDF
Checksum (MD5)
df0eb6be17302a4acb499c30473bc1a2
Author(s)
Seth, Danny, 1978-
Advisor(s)
Donald E. Troxel.
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (p. 137-138).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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