Chemical vapor etching of GaAs by CH3I
Name
30772398-MIT.pdf
Description
Full printable version
Size
9.97 MB
Format
Adobe PDF
Checksum (MD5)
93c64e63481bc2d2ba95fef20272ec27
Author(s)
Krueger, Charles Winslow
Advisor(s)
Maria Flytzani-Stephanopoulos, Robert A. Brown.
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.
Includes bibliographical references (leaves 174-179).
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
Terms of Use
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