Characterization of low k CVD deposited interlayer dielectrics for integrated circuits
Name
38509168-MIT.pdf
Description
Full printable version
Size
5.83 MB
Format
Adobe PDF
Checksum (MD5)
cae580048b822c8c101690226e3372a2
Author(s)
Harker, Marnie L. (Marnie Lynn), 1974-
Advisor(s)
Karen K. Gleason.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.
Includes bibliographical references (leaves 62-66).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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