Self-consistent continuum modeling of radio-frequency glow discharges
Name
22949810-MIT.pdf
Description
Full printable version
Size
24.62 MB
Format
Adobe PDF
Checksum (MD5)
8d42602710a132f64dcffaa498f44157
Author(s)
Gogolides, Evangelos
Advisor(s)
Herbert H. Sawin.
Date Issued
1990
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1990.
Includes bibliographical references (leaves 274-287).
Subjects
Chemical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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