Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester
Name
Xu_2015_J._Phys.__Conf._Ser._660_012013.pdf
Size
2.69 MB
Format
Adobe PDF
Checksum (MD5)
61847d41031f40a2dd85b781ca2d592d
Author(s)
Kim, Sang-Gook
Xu, Ruize
Date Issued
December 2015
Journal
Journal of Physics: Conference Series
Publisher
IOP Publishing
Citation
Xu, R, and S G Kim. “Low-Frequency, Low-G MEMS Piezoelectric Energy Harvester.” Journal of Physics: Conference Series 660 (December 10, 2015): 012013. © 2018 IOP Publishing
Version
Final published version
Abstract
This paper reports the design, modeling and fabrication of a novel MEMS device for low-frequency, low-g vibration energy harvesting. The new design is based on bi-stable buckled beam structure. To implement the design at MEMS scale, we further proposed to employ residual stress in micro-fabricated thin films. With an electromechanical lumped model, the multi-layer beam could be designed to achieve bi-stability with desired frequency range and excitation amplitude. A macro-scale prototype has been built and tested to verifies the prediction of the performance enhancement of the bi-stable beam at low frequencies. A MEMS scale prototype has been fabricated and tested to verify the frequency range at low excitation amplitude. The MEMS device shows wide operating frequency range from 50Hz to 150Hz at 0.2g without external proof mass. The same device with external proof mass has lower frequency range (< 10Hz) with boosted deflection amplitude.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Creative Commons Attribution 3.0 Unported license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/1742-6596/660/1/012013
