Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine
Name
McCarthy-2009-Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine.pdf
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1.25 MB
Format
Adobe PDF
Checksum (MD5)
ac919a32ed6faced05d3f1f7f84329da
Author(s)
McCarthy, Matthew
Waits, C. Mike
Ghodssi, Reza
Date Issued
April 2009
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Citation
McCarthy, M., C.M. Waits, and R. Ghodssi. “Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing Using an Integrated Microturbine.” Microelectromechanical Systems, Journal of 18.2 (2009): 263-273. © Copyright 2010 IEEE
Version
Final published version
Abstract
The demonstration and characterization of a novel planar-contact encapsulated microball bearing using a radial in-flow microturbine are presented. Stable operation of the air-driven silicon microturbine is shown for over 1 000 000 revolutions at speeds, pressure drops, and flow rates of up to 10 000 r/min, 0.45 lbf/in2, and 3.5 slm, respectively. Incorporation of a gas thrust plenum using a novel packaging scheme has enabled comprehensive spin-down friction characterization of the encapsulated microball bearing. An empirical power-law model for dynamic friction has been developed for speeds of 250-5000 r/min and loads of 10-50 mN, corresponding to torques of 0.0625-2.5 muNldrm and friction torque constants of 2.25-5.25 x 10[superscript -4] muNldrm/ r/min. The onset and effect of wear and wear debris have been studied, showing negligible wear in the load bearing surfaces for the operating conditions considered.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/JMEMS.2009.2013407
