A high resolution capacitance-based lateral position microsensor

Adams, Douglas Edward

A high resolution capacitance-based lateral position microsensor

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Author(s)

Adams, Douglas Edward

Advisor(s)

Kamal Youcef-Toumi.

Date Issued

1997

Publisher

Massachusetts Institute of Technology

Description

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Includes bibliographical references (leaves 161-164).

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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