Nanomanufacturing Methods for the Reduction of Noise in Carbon Nanotube-Based Piezoresistive Sensor Systems
Name
Culpepper_Nanomanufacturing methods.pdf
Size
1.61 MB
Format
Adobe PDF
Checksum (MD5)
fc1c43beac841600bd328ad1be8f5a7a
Author(s)
Culpepper, Martin
Cullinan, Michael Arthur
Date Issued
March 2013
Journal
Journal of Micro and Nano-Manufacturing
Publisher
American Society of Mechanical Engineers (ASME)
Citation
Cullinan, Michael A., and Martin L. Culpepper. “Nanomanufacturing Methods for the Reduction of Noise in Carbon Nanotube-Based Piezoresistive Sensor Systems.” Journal of Micro and Nano-Manufacturing 1, no. 1 (March 22, 2013): 011011. © 2013 American Society of Mechanical Engineers ASME
Version
Final published version
Abstract
Carbon nanotube (CNT)-based piezoresistive strain sensors have the potential to outperform traditional silicon-based piezoresistors in MEMS devices due to their high strain sensitivity. However, the resolution of CNT-based piezoresistive sensors is currently limited by excessive 1/f or flicker noise. In this paper, we will demonstrate several nanomanufacturing methods that can be used to decrease noise in the CNT-based sensor system without reducing the sensor's strain sensitivity. First, the CNTs were placed in a parallel resistor network to increase the total number of charge carriers in the sensor system. By carefully selecting the types of CNTs used in the sensor system and by correctly designing the system, it is possible to reduce the noise in the sensor system without reducing sensitivity. The CNTs were also coated with aluminum oxide to help protect the CNTs from environmental effects. Finally, the CNTs were annealed to improve contact resistance and to remove adsorbates from the CNT sidewall. The optimal annealing conditions were determined using a design-of-experiments (DOE). Overall, using these noise mitigation techniques it is possible to reduce the total noise in the sensor system by almost 3 orders of magnitude and increase the dynamic range of the sensors by 48 dB.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1115/1.4023159
