Ice and abrasive particles : an alternative CMP polishing technique

Born, Melanie P. (Melanie Providencia), 1975-

Ice and abrasive particles : an alternative CMP polishing technique

Download

Name

42004628-MIT.pdf

Description

Full printable version

Size

2.93 MB

Format

Adobe PDF

Checksum (MD5)

fe66f3aa72e50bed1b1e74f2ce1e4e67

Author(s)

Born, Melanie P. (Melanie Providencia), 1975-

Advisor(s)

Nam P. Suh.

Date Issued

1998

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.

Includes bibliographical references (p. 45-46).

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

Terms of Use

M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.

http://dspace.mit.edu/handle/1721.1/7582

Persistent DSpace Link

http://hdl.handle.net/1721.1/9570