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Deposition and characterization of silicon-germanium alloy thin films on oxide

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Author(s)
Tsai, Julie Ann
Advisor(s)
Rafael Reif.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Includes bibliographical references (p. 177-187).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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