Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion
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Berggren_Directed self-assembly.pdf
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152634ebc4f9fcaa04e548cdbc735c4f
Author(s)
Duan, Huigao
Berggren, Karl K.
Date Issued
August 2010
Journal
Nano Letters
Publisher
American Chemical Society (ACS)
Citation
Duan, Huigao, and Karl K. Berggren. “Directed Self-Assembly at the 10 Nm Scale by Using Capillary Force-Induced Nanocohesion.” Nano Lett. 10, no. 9 (September 8, 2010): 3710–3716.
Version
Author's final manuscript
Abstract
We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication of nanodevices, nanopatterning, and fluid-flow investigations.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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DOI of Published Version
https://doi.org/10.1021/nl102259s
