Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient
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Singer_Direct-Write Thermocapillary.pdf
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Author(s)
Singer, Jonathan P.
Michel, Jurgen
Thomas, Edwin L.
Lin, Pao Tai
Kooi, Steven E
Kimerling, Lionel C
Date Issued
August 2013
Journal
Advanced Materials
Publisher
Wiley Blackwell
Citation
Singer, Jonathan P., Pao-Tai Lin, Steven E. Kooi, Lionel C. Kimerling, Jurgen Michel, and Edwin L. Thomas. “Direct-Write Thermocapillary Dewetting of Polymer Thin Films by a Laser-Induced Thermal Gradient.” Advanced Materials 25, no. 42 (August 21, 2013): 6100–6105.
Version
Author's final manuscript
Abstract
A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.
MIT Department
Massachusetts Institute of Technology. Institute for Soldier Nanotechnologies
MIT Materials Research Laboratory
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1002/adma.201302777
