Tunable impedance matching networks based on phase-switched impedance modulation
Name
ECCE17 PSIM Jurkov manuscript_v4.pdf
Description
Accepted version
Size
1007.29 KB
Format
Adobe PDF
Checksum (MD5)
fbbe6d0d374485475032e209b38a2a7c
Author(s)
Jurkov, Alexander
Radomski, Aaron
Perreault, David J
Date Issued
October 2017
Journal
Proceedings of the 2017 IEEE Energy Conversion Congress and Exposition
Publisher
IEEE
Citation
Jurkov, Alexander S., Aaron Radomski, and David J. Perreault. "Tunable impedance matching networks based on phase-switched impedance modulation." IEEE Energy Conversion Congress and Exposition, October 2017, Cincinnati, OH, USA, IEEE, 2017.
Version
Author's final manuscript
Abstract
The ability to provide accurate, rapid and dynamically-controlled impedance matching offers significant advantages to a wide range of present and emerging radio-frequency (RF) power applications. This work develops a new type of tunable impedance matching networks (TMN) that enables a combination of much faster and more accurate impedance matching than is available with conventional techniques. This implementation is based on a narrow-band technique, termed here phase-switched impedance modulation (PSIM), which entails the switching of passive elements at the RF operating frequency, effectively modulating their impedances. The proposed approach provides absorption of device parasitics and zero-voltage switching (ZVS) of the active devices, and we introduce control techniques that enable ZVS operation to be maintained across operating conditions. A prototype PSIM-based TMN is developed that provides a 50 Ohms match over a load impedance range suitable for inductively-coupled plasma processes. The prototype TMN operates at frequencies centered around 13.56 MHz at input RF power levels of up to 150 W.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Research Laboratory of Electronics
Terms of Use
Creative Commons Attribution-Noncommercial-Share Alike
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1109/ecce.2017.8095887
