Calibration of a microvision system for MEMS device characterization
Name
48982853-MIT.pdf
Description
Full printable version
Size
4.19 MB
Format
Adobe PDF
Checksum (MD5)
96bad51061eaa9ebcdb450ccf16500b9
Author(s)
Bardhan, Jaydeep Porter, 1978-
Advisor(s)
Stephen D. Senturia.
Alternative Title
Calibration of a microvision system for microelectromechanical system device characterization
Date Issued
2001
Publisher
Massachusetts Institute of Technology
Abstract
With the growing use of microelectromechanical systems (MEMS), it becomes increasingly important that reliable, accurate methods for characterizing and calibrating MEMS be developed. One microsystem in need of specific characterization measurements is the polychromator, an electrically programmable, surface micromachined diffraction grating. A microvision system has been developed to measure the electromechanical behavior of the polysilicon beams that comprise this device. Proper rigor demands that the system for making characterizations should itself be characterized; its accuracy and precision should be determined, so that users may understand the possible error margins of its measurements. This thesis describes HUMS (Heavily Upsampling Microvision System), the software application developed to automate the characterization of the polychromator, and the method developed to quantify the accuracy of the HUMS application.
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (leaves 56-57).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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