Chemical vapor deposition modeling using direct simulation Monte Carlo with non-linear chemistry and level set profile evolution
Name
54663274-MIT.pdf
Description
Full printable version
Size
7.9 MB
Format
Adobe PDF
Checksum (MD5)
646dc53bc7a3209cfd36fce74c4cc8e6
Author(s)
Al-Mohssen, Husain Ali, 1977-
Advisor(s)
Nicolas G. Hadjiconstantinou.
Date Issued
2003
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.
Includes bibliographical references.
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
Terms of Use
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