Characterization and modeling of uniformity in chemical mechanical polishing
Name
43556183-MIT.pdf
Description
Full printable version
Size
5.96 MB
Format
Adobe PDF
Checksum (MD5)
eedc3ad66dfa5964f9202f829880cd74
Author(s)
Oji, Charles (Charles Ojih), 1974-
Advisor(s)
Duane Boning and James Chung.
Alternative Title
Characterization and modeling in chemical mechanical polishing processes
Date Issued
1999
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaves 55-56).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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copyright. They may be viewed from this source for any purpose, but
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