Automatic graphene transfer system for improved material quality and efficiency
Name
Bosca-2016-Automatic Graphene.pdf
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840.68 KB
Format
Adobe PDF
Checksum (MD5)
50ace17aeb07969c4ec75c88f56b45d2
Author(s)
Bosca, Alberto
Pedros, Jorge
Martinez, Javier
Palacios, Tomas
Calle, Fernando
Date Issued
February 2016
Journal
Scientific Reports
Publisher
Nature Publishing Group
Citation
Bosca, Alberto, Jorge Pedros, Javier Martinez, Tomas Palacios, and Fernando Calle. “Automatic Graphene Transfer System for Improved Material Quality and Efficiency.” Scientific Reports 6 (February 10, 2016): 21676.
Version
Final published version
Abstract
In most applications based on chemical vapor deposition (CVD) graphene, the transfer from the growth to the target substrate is a critical step for the final device performance. Manual procedures are time consuming and depend on handling skills, whereas existing automatic roll-to-roll methods work well for flexible substrates but tend to induce mechanical damage in rigid ones. A new system that automatically transfers CVD graphene to an arbitrary target substrate has been developed. The process is based on the all-fluidic manipulation of the graphene to avoid mechanical damage, strain and contamination, and on the combination of capillary action and electrostatic repulsion between the graphene and its container to ensure a centered sample on top of the target substrate. The improved carrier mobility and yield of the automatically transferred graphene, as compared to that manually transferred, is demonstrated by the optical and electrical characterization of field-effect transistors fabricated on both materials. In particular, 70% higher mobility values, with a 30% decrease in the unintentional doping and a 10% strain reduction are achieved. The system has been developed for lab-scale transfer and proved to be scalable for industrial applications.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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Creative Commons Attribution
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1038/srep21676
