Pattern dependencies in the plasma etching of polysilicon

Dalton, Timothy Joseph

Pattern dependencies in the plasma etching of polysilicon

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Author(s)

Dalton, Timothy Joseph

Advisor(s)

Herbert H. Sawin.

Date Issued

1994

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.

Includes bibliographical references (p. 423-441).

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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