Assessing the viability of various metallic microfabrication techniques
Name
50679979-MIT.pdf
Description
Full printable version
Size
7.23 MB
Format
Adobe PDF
Checksum (MD5)
611f6759c37dd71115fd1fa14b4a8a75
Author(s)
Hastings, Abel Z., 1973-
Advisor(s)
Merton C. Flemings.
Date Issued
2002
Publisher
Massachusetts Institute of Technology
Abstract
An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property.
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.
Includes bibliographical references (p. 85-89).
Subjects
Materials Science and Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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