A distributed software architecture for semiconductors process design
Name
39134655-MIT.pdf
Description
Full printable version
Size
38.22 MB
Format
Adobe PDF
Checksum (MD5)
ff3990b119fce17d5c3a56e5616a48f2
Author(s)
Verminski, Matthew D. (Matthew David), 1974-
Advisor(s)
Michael B. McIlrath, Donald E. Troxel.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 67-68).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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