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  5. Increased semiconductor fabrication capacity through cross-site processing

Increased semiconductor fabrication capacity through cross-site processing

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Author(s)
Cowger, Christopher L. (Christopher Leland), 1971-
Advisor(s)
Thomas L. Magnanti and James E. Chung.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, (S.M.)--Massachusetts Institute of Technology, Sloan School of Management, 1998.
Includes bibliographical references (leaves 68-69).
Subjects
Electrical Engineering and Computer Science
Sloan School of Management
MIT Department
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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http://dspace.mit.edu/handle/1721.1/7582
Persistent DSpace Link
http://hdl.handle.net/1721.1/46221
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