Characterization of chemical vapor deposited polycrystalline silicon thin films
Name
15128329-MIT.pdf
Description
Full printable version
Size
6.7 MB
Format
Adobe PDF
Checksum (MD5)
4c6497c1acef3dcd967714d4a5285ae8
Author(s)
Hajjar, Jean-Jacques Joseph
Advisor(s)
L. Rafael Reif and David Adler.
Date Issued
1986
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1986.
MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING
Bibliography: leaves 134-139.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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