Subcritical crack growth in polysilicon MEMS

Van Arsdell, William W. (William Walker)

Subcritical crack growth in polysilicon MEMS

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Author(s)

Van Arsdell, William W. (William Walker)

Advisor(s)

David M. Parks.

Date Issued

1997

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.

Includes bibliographical references.

Subjects

Mechanical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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http://hdl.handle.net/1721.1/10439