A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor
Name
Gassend-2009-A microfabricated planar electrospray array ionic liquid ion source with integrated extractor.pdf
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1.37 MB
Format
Adobe PDF
Checksum (MD5)
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Author(s)
Gassend, Blaise
Velasquez-Garcia, Luis Fernando
Akinwande, Akintunde Ibitayo
Martinez-Sanchez, Manuel
Date Issued
June 2009
Journal
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers
Citation
Gassend, B. et al. “A Microfabricated Planar Electrospray Array Ionic Liquid Ion Source With Integrated Extractor.” Microelectromechanical Systems, Journal of 18.3 (2009): 679-694. © 2009 IEEE
Version
Final published version
Abstract
This paper reports the design, fabrication, and experimental characterization of a fully microfabricated planar array of externally fed electrospray emitters that produces heavy molecular ions from the ionic liquids EMI-BF[subcript 4] and EMI-Im. The microelectromechanical systems (MEMS) electrospray array is composed of the following two microfabricated parts: 1) an emitter die with as many as 502 emitters in 1.13 cm[superscript 2] and 2) an extractor component that provides assembly alignment, electrical insulation, and a common bias voltage to the emitter array. The devices were created using Pyrex and silicon substrates, as well as microfabrication techniques such as deep reactive ion etching, low-temperature fusion bonding, and anodic bonding. The emitters are coated with black silicon, which acts as a wicking material for transporting the liquid to the emitter tips. The extractor electrode uses a 3-D MEMS packaging technology that allows hand assembly of the two components with micrometer-level precision. Experimental characterization of the MEMS electrospray array includes current-voltage characteristics, time-of-flight mass spectrometry, beam divergence, and imprints on a collector. The data show that with both ionic liquids and in both polarities, the electrospray array works in the pure ionic regime, emitting ions with as little as 500 V of bias voltage. The data suggest that the MEMS electrospray array ion source could be used in applications such as coating, printing, etching, and nanosatellite propulsion.
Subjects
3-D packaging
Black silicon
electrospray array
ion source
ionic liquid
MIT Department
Massachusetts Institute of Technology. Department of Aeronautics and Astronautics
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Microsystems Technology Laboratories
Terms of Use
Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1109/JMEMS.2009.2015475
