Design of a precision chemical mechanical planarization research system
Name
46310295-MIT.pdf
Description
Full printable version
Size
26.68 MB
Format
Adobe PDF
Checksum (MD5)
4cf47f97bdf2290d5b361472978d8f00
Author(s)
Hashemi, Fardad Ali, 1976-
Advisor(s)
Ernesto E. Blanco.
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.
Includes bibliographical references (leaf 208).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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