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  5. Design of a precision chemical mechanical planarization research system

Design of a precision chemical mechanical planarization research system

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Author(s)
Hashemi, Fardad Ali, 1976-
Advisor(s)
Ernesto E. Blanco.
Date Issued
2000
Publisher
Massachusetts Institute of Technology
Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.
Includes bibliographical references (leaf 208).
Subjects
Mechanical Engineering.
MIT Department
Massachusetts Institute of Technology. Department of Mechanical Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/89285
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