Image grating metrology using a Fresnel zone plate

Joo, Chulmin, 1976-

Image grating metrology using a Fresnel zone plate

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Author(s)

Joo, Chulmin, 1976-

Advisor(s)

Mark L. Schattenburg and George Barbastathis.

Date Issued

2003

Publisher

Massachusetts Institute of Technology

Description

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.

Includes bibliographical references (p. 107-110).

Subjects

Mechanical Engineering.

MIT Department

Massachusetts Institute of Technology. Department of Mechanical Engineering

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