Laser-assisted focused-ion-beam-induced deposition of copper

Funatsu, Jun

Laser-assisted focused-ion-beam-induced deposition of copper

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31907615-MIT.pdf

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Author(s)

Funatsu, Jun

Advisor(s)

Carl V. Thompson, II.

Date Issued

1994

Publisher

Massachusetts Institute of Technology

Description

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994.

Includes bibliographical references (leaves 73-74).

Subjects

Materials Science and Engineering

MIT Department

Massachusetts Institute of Technology. Department of Materials Science and Engineering

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