Alternative chemistries for etching of silicon dioxide and silicon nitride
Name
36962410-MIT.pdf
Description
Full printable version
Size
37.54 MB
Format
Adobe PDF
Checksum (MD5)
23e99153f61a3a83f80f49af3859655a
Author(s)
Karecki, Simon Martin
Advisor(s)
L. Rafael Reif.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (p. 123-126).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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