All graphene electromechanical switch fabricated by chemical vapor deposition
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Baldo_All graphene.pdf
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Author(s)
Milaninia, Kaveh M.
Baldo, Marc A.
Reina, Alfonso
Kong, Jing
Date Issued
November 2009
Journal
Applied Physics Letters
Publisher
American Institute of Physics (AIP)
Citation
Milaninia, Kaveh M., Marc A. Baldo, Alfonso Reina, and Jing Kong. “All Graphene Electromechanical Switch Fabricated by Chemical Vapor Deposition.” Appl. Phys. Lett. 95, no. 18 (2009): 183105. © 2009 American Institute of Physics
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Final published version
Abstract
We demonstrate an electromechanical switch comprising two polycrystalline graphene films; each deposited using ambient pressure chemical vapor deposition. The top film is pulled into electrical contact with the bottom film by application of approximately 5 V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of switching at low voltage confirms that graphene is an attractive material for electromechanical switches. Reliability may be improved by scaling the device area to within one crystalline domain of the graphene films.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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DOI of Published Version
https://doi.org/10.1063/1.3259415
