A Silicon MEMS EM vibration energy harvester
Name
Yang_2019_J._Phys.__Conf._Ser._1407_012022(1).pdf
Description
Published version
Size
21.38 MB
Format
Adobe PDF
Checksum (MD5)
13be32d69ba14e174d8ca364e3d0836a
Author(s)
Yang, Ying-Ching Eric
Radhakrishna, Ujwal
Ward, D.
Chandrakasan, Anantha P
Lang, Jeffrey H.
Date Issued
November 2019
Journal
Journal of Physics: Conference Series
Publisher
IOP Publishing
Citation
Yang, Y. "A Silicon MEMS EM vibration energy harvester." Journal of Physics: Conference Series, 1407 (November 2019). © Published under license by IOP Publishing Ltd.
Version
Final published version
Abstract
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
MIT Department
Massachusetts Institute of Technology. Research Laboratory of Electronics
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
Creative Commons Attribution 3.0 unported license
Persistent DSpace Link
DOI of Published Version
https://doi.org/10.1088/1742-6596/1407/1/012022
