Aligned T-gate, fabrication using X-ray lithography
Name
36962409-MIT.pdf
Description
Full printable version
Size
10.81 MB
Format
Adobe PDF
Checksum (MD5)
5c91f8296c82a5ea3d3d8d438fc689f6
Author(s)
Meinhold, Mitchell W., 1972-
Advisor(s)
Henry I. Smith.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 55-56).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
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