Development of chipscale chalcogenide glass based infrared chemical sensors
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Agarwal_Development of Chipscale.pdf
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1.59 MB
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Checksum (MD5)
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Author(s)
Hu, Juejun
Musgraves, J. David
Carlie, Nathan
Zdyrko, Bogdan
Luzinov, Igor
Richardson, Kathleen
Agrawal, Anuradha Murthy
Kimerling, Lionel C.
Date Issued
January 2011
Journal
Quantum Sensing and Nanophotonic Devices VIII
Publisher
Society of Photo-optical Instrumentation Engineers
Citation
Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson and Lionel Kimerling, "Development of chipscale chalcogenide glass based infrared chemical sensors", in Quantum Sensing and Nanophotonic Devices VIII, (Proc. of SPIE 7945, 79452C (2011). © 2011 SPIE.
Version
Final published version
Abstract
In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Massachusetts Institute of Technology. Microphotonics Center
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Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
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DOI of Published Version
https://doi.org/10.1117/12.871399
