Regular pattern formation through the retraction and pinch-off of edges during solid-state dewetting of patterned single crystal films
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Ye-2010-Regular pattern form.pdf
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Author(s) •
Ye, Jongpil
Thompson, Carl V.
Date Issued
November 2010
Journal
Physical Review B
Publisher
American Physical Society
Citation
Ye, Jongpil, and Carl V. Thompson. “Regular Pattern Formation Through the Retraction and Pinch-off of Edges During Solid-state Dewetting of Patterned Single Crystal Films.” Physical Review B 82.19 (2010) : 193408. © 2010 The American Physical Society
Version
Final published version
Abstract
We report the formation of regular patterns of metal lines via solid-state dewetting of lithographically patterned single-crystal Ni(110) films with square and cross shapes. During the solid-state dewetting, valleys develop behind retracting edges and eventually lead to pinch-off and formation of lines. Mass accumulation at convex pattern corners also leads to formation of lines. We show that the size of large-scale patterns and surface-energy anisotropy affect the smaller-scale dewetted structures in a deterministic way.
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
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DOI of Published Version
https://doi.org/10.1103/PhysRevB.82.193408