Accurate characterization of nanophotonic grating structures
Name
1237567531-MIT.pdf
Size
10.79 MB
Format
Adobe PDF
Checksum (MD5)
029d3c6dc1f78929acd6aae23861a90c
Author(s)
Yeung, Wings T.
Advisor(s)
Cardinal Warde and Jinxin Fu.
Date Issued
2020
Publisher
Massachusetts Institute of Technology
Abstract
Augmented reality waveguides are designed to have grating regions to in-couple, out-couple, and propagate light from a light engine to the user. This thesis develops two reliable systems to qualify manufactured waveguides. The first system determines grating quality by measuring grating pitch and orientation uniformity across grating regions. The system uses scatterometry in Littrow configuration and captures both the reflected zeroth and first order diffracted light. The second system determines the overall quality of a waveguide by measuring the resolution of the device using a Modulation Transfer Function, MTF, technique. MTF is commonly measured using either the line pair method or the slant edge method. This thesis proposes a new method to measure MTF using single pixel illumination and point spread function. Results from the two systems are presented, and the capabilities and limitations of each system are explored.
Description
Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February, 2020
Cataloged from student-submitted PDF of thesis.
Includes bibliographical references (page 75).
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
MIT theses may be protected by copyright. Please reuse MIT thesis content according to the MIT Libraries Permissions Policy, which is available through the URL provided.
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