Epitaxial silicon growth rate control
Name
31163544-MIT.pdf
Description
Full printable version
Size
2.97 MB
Format
Adobe PDF
Checksum (MD5)
58273a110267be1f84d49cc52c35a802
Author(s)
Yeboah-Amankwah, Safroadu Kwadwo
Date Issued
1994
Publisher
Massachusetts Institute of Technology
Description
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.
Title as it appears in the June 1994 MIT Graduate List: Real time growth rate control of epitaxial silicon.
Includes bibliographical references (leaves 65-66).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Terms of Use
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