SIMOX BOX metrology : using physical and electrical characterization
Name
34312002-MIT.pdf
Description
Full printable version
Size
2.63 MB
Format
Adobe PDF
Checksum (MD5)
458d0414af0e77578c76e1e5ae5dce9b
Author(s)
Yoon, Jung Uk, 1971-
Advisor(s)
James E. Chung, Carl V. Thompson II.
Date Issued
1995
Publisher
Massachusetts Institute of Technology
Description
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995.
Vita.
Includes bibliographical references (p. 47-49).
Subjects
Materials Science and Engineering
MIT Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Terms of Use
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