Metrology of very thin silicon epitaxial films
Name
40328627-MIT.pdf
Description
Full printable version
Size
15.48 MB
Format
Adobe PDF
Checksum (MD5)
c2bf2f37d695bb9430e0e49b3ed5b5be
Author(s)
Cherkassky, Alexander (Alexander Peter), 1963-
Advisor(s)
Rafael Reif.
Date Issued
1998
Publisher
Massachusetts Institute of Technology
Description
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (p. 135-139).
Subjects
Electrical Engineering and Computer Science
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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copyright. They may be viewed from this source for any purpose, but
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