Gas-phase cleaning of silicon wafer surfaces

Lawing, Andrew S. (Andrew Scott)

Gas-phase cleaning of silicon wafer surfaces

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Author(s)

Lawing, Andrew S. (Andrew Scott)

Advisor(s)

Herbert H. Sawin.

Date Issued

1997

Publisher

Massachusetts Institute of Technology

Description

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.

Includes bibliographical references.

Subjects

Chemical Engineering

MIT Department

Massachusetts Institute of Technology. Department of Chemical Engineering

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