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  5. Gas-phase cleaning of silicon wafer surfaces

Gas-phase cleaning of silicon wafer surfaces

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Author(s)
Lawing, Andrew S. (Andrew Scott)
Advisor(s)
Herbert H. Sawin.
Date Issued
1997
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997.
Includes bibliographical references.
Subjects
Chemical Engineering
MIT Department
Massachusetts Institute of Technology. Department of Chemical Engineering
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
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http://hdl.handle.net/1721.1/38852
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