Automated mask aligner for multilevel mask exposures

Owens, Anthony L. (Anthony LeRoy)

Automated mask aligner for multilevel mask exposures

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Name

19592129-MIT.pdf

Description

Full printable version

Size

17.56 MB

Format

Adobe PDF

Checksum (MD5)

dbc4fd1613edc1998268a3d628f673fd

Author(s)

Owens, Anthony L. (Anthony LeRoy)

Advisor(s)

Wilfred Veldkamp.

Date Issued

1988

Publisher

Massachusetts Institute of Technology

Description

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1988.

Includes bibliographical references.

Subjects

Electrical Engineering and Computer Science.

MIT Department

Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science

Terms of Use

MIT theses are protected by copyright. They may be viewed, downloaded, or printed from this source but further reproduction or distribution in any format is prohibited without written permission.

http://dspace.mit.edu/handle/1721.1/7582

Persistent DSpace Link

http://hdl.handle.net/1721.1/117459