Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Name

RLE-TR-565-24950294.pdf

Size

11.46 MB

Format

Adobe PDF

Checksum (MD5)

1ad1ecbd200e4b8d568a53518120be7b

Date Issued

1991

Publisher

Research Laboratory of Electronics, Massachusetts Institute of Technology

Series/Report no.

Technical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565.

Description

Includes bibliographical references (p. 155-163).

MIT Department

Massachusetts Institute of Technology. Research Laboratory of Electronics

Persistent DSpace Link